| 摘要 |
PURPOSE:To prevent deformation and breakage even if a diaphragm is pressed to a backup plate with an excessive pressure by allowing it to make a deflective deformation together with the diaphragm when an abnormal pressure is generated. CONSTITUTION:The internal space of a pump body 1 is partitioned by a diaphragm 8 airtightly into an oil working chamber 11 and a pumping chamber 12. In the oil working chamber 11, a backup plate 9 is installed which is to restrict the displacement of the diaphragm 8. A plunger 7 is inserted in a cylinder 6 installed in continuity to the oil working chamber 11 in such a way as capable of reciprocative motions, and transport flow-paths 15, 18 are connected with the pumping chamber 12. No deflective deformation is generated particularly in the condition that the backup plate 9 is in normal operation, but it is allowed to make deflective deformation together with the diaphragm 8 when an abnormal pressure is generated. Accordingly the backup plate 9 makes deflective deformation together with the diaphragm 8 so as to relieve the force applied thereto. |
