| 摘要 |
<p>PURPOSE:To make it possible to continue die bonding without halting the operation of a device by picking up the tip of a collet with an ITV and spraying a gaseous body to a foreign matter if detected and removing the foreign matter. CONSTITUTION:A collet 2 loads a die 4 on an island 6 on a lead frame 5 and then operates so as to pick up a succeeding die as shown in an arrow F and moves to a ring 3. During the movement of the collet, an ITV 7 picks up the tip of the collet 2 and feeds the image to an image processing device 9 and compares the image with a collet preliminarily memorized and determines the presence of a foreign matter and the type of the detected foreign matter. In case when the attracted foreign matter is a metal, such as solder, a heater 20 installed to the collet 2 is heated by the command from a die bonding control device 10 and the metal foreign matter is softened. After the foreign matter is softened, an air or an N2 gas is fed into a space 22 installed coaxially with a hollow hole 21, thereby blowing off the foreign matter. This construction makes it possible to continue the die bonding.</p> |
