Arrangement for measuring small capacitances

摘要

The invention relates to an arrangement for measuring small capacitances, a capacitance to be measured being the frequency-determining element of an oscillator, and it being possible to take the capacitance-dependent output signal from a subtractor. In order to produce a measuring arrangement in which the linearity of the measurement result is guaranteed, at least one oscillator (7), the frequency of which is indirectly proportional to the capacitance (10, 11), is connected via a resonant circuit (8) to a matching circuit (9) which is connected to the subtractor (14). <IMAGE>