Plasma diagnosing apparatus

摘要

PCT No. PCT/JP91/01568 Sec. 371 Date Jul. 15, 1992 Sec. 102(e) Date Jul. 15, 1992 PCT Filed Nov. 15, 1991 PCT Pub. No. WO92/09185 PCT Pub. Date May 29, 1992.A plasma diagnosing apparatus for performing plasma diagnosis witch probes having a high degree of cleanliness by removing contamination caused by reactive plasma, etc., while quantitatively detecting a degree of the contamination of the probes. The disclosed apparatus avoids the disadvantages of conventional apparatuses, in which the voltage-current characteristics of the probes are deteriorated by growth of the contaminant film formed on the probes, making it difficult to measure the parameters of the plasma conditions.