Silicon substrate having YSZ epitaxial barrier layer and an epitaxial superconducting layer

摘要

An HTSC material epitaxially deposited on a YSZ buffer layer on a surface of a monocrystalline silicon substrate has a zero resistance transition temperature of at least 85 DEG K., a transition width (10-90%) of no more than 1.0 DEG K., a resistivity at 300 DEG K. of no more than 300 micro-ohms-centimeter and a resistivity ratio (at 300 DEG K./100 DEG K.) of 3.0+/- 0.2. The surface of the silicon substrate is cleaned using a spin-etch process to produce an atomically clean surface terminated with an atomic layer of an element such as hydrogen with does not react with silicon. The substrate can be moved to a deposition chamber without contamination. The hydrogen is evaporated in the chamber, and then YSZ is epitaxially deposited preferably by laser ablation. Thereafter, the HTSC material, such as YBCO, is epitaxially deposited preferably by laser ablation. The structure is then cooled in an atmosphere of oxygen.