METHOD AND DEVICE FOR ALIGNING SUBSTRATE FOR CARRYING IN AND OUT USING ROBOT MECHANISM,申请号JP19940008702-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ALIGNING SUBSTRATE FOR CARRYING IN AND OUT USING ROBOT MECHANISM
摘要
申请公布号	JPH06297363(A)	申请公布日期	1994.10.25
申请号	JP19940008702	申请日期	1994.01.28
申请人	APPLIED MATERIALS INC	发明人	KUREIGU ERU SUTEIIBUNSU
分类号	B25J9/10;B25J9/18;B25J13/08;B65G1/00;G03F7/20;H01L21/00;H01L21/677;H01L21/68;H05K13/02;(IPC1-7):B25J9/10	主分类号	B25J9/10
代理机构		代理人
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地址

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