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发明名称
FORMATION OF SILICON DIOXIDE FILM
摘要
申请公布号
JPH06295901(A)
申请公布日期
1994.10.21
申请号
JP19930106154
申请日期
1993.04.07
申请人
NIPPON STEEL CORP
发明人
TAKEUCHI HIDEKI
分类号
C23C16/40;H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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