DEVICE AND METHOD FOR FILM PROCESSING

摘要

PURPOSE:To obtain a laser beam having a definite termination of the end part without effect of the spherical aberration of a lens and to prevent scattering of the laser beam on the surface of a material to be processed when the laser beam is condensed on the surface of the material to be processed in a linear shape. CONSTITUTION:The laser beam 20 radiated from an excimer laser generating means 1 is expanded by a beam expander 2. The expanded laser beam 21 is cut with its edge part by a slit 3 and condensed in a linear shape by a cylindrical lens 4. A moving table 25 which is moved only in one direction is arranged so that the surface to be processed of a material to be processed 11 comes inside the focal distance of cylindrical lens 4 when mounting the material 11 on the table 25.