| 摘要 |
PURPOSE:To perform the evaluation, i.e., the measurement of the characteristic, of a thin film with excellent versatility and surely. CONSTITUTION:A prism 13 for optical coupling is arranged on a face on the side opposite to the side, on which a thin film 11 to be evaluated has been formed, of a light-transmitting substrate 12 on which the thin film 11 to be evaluated has been formed. The thin film 11 to be evaluated is irradiated with an optical beam 14 for measurement via the prism 13. The analytical evaluaiton of the thin film by attenuation and total reflection is performed. |
