ATTENUATED TOTAL REFLACTANCE TYPE THIN FILM EVALUATING DEVICE

摘要

PURPOSE:To substantially avoid that the shift of the irradiation position, for example, on the bottom surface for evaluating ATR (attenuated total reflection) is generated by the angle sweeping of the measuring laser beam. CONSTITUTION:A placing stand 61 on which a sample 62 having a thin film to be evaluated is placed is constituted. The moving stage 75 movable in the normal line direction of the thin film to be evaluated along the surface of the rotary stage 60 on which the sample 62 is placed of a goniometer is provided on the rotary stage 60. A beam shifter 68 is arranged on the beam path of the incident measuring beam 14 to the sample 62 on the moving stage 75 and the optical axis of the measuring laser beam is shifted by the beam shifter 68.