High sensitivity mid and deep UV resist,申请号SG19940000435-传众专利搜索

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发明名称	High sensitivity mid and deep UV resist
摘要
申请公布号	SG43594(G)	申请公布日期	1994.10.14
申请号	SG19940000435	申请日期	1994.03.24
申请人	HOECHST CELANESE CORPORATION	发明人	LAZARUS RICHARD MICHAEL;REARDON EDWARD JOSEPH;DIXIT SUNIT SURESH
分类号	(IPC1-7):G03F7/08	主分类号	(IPC1-7):G03F7/08
代理机构		代理人
主权项
地址

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