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发明名称
摘要
申请公布号
JPH0680658(B2)
申请公布日期
1994.10.12
申请号
JP19910262344
申请日期
1991.10.09
申请人
SANSEI ELECTRONICS CORP
发明人
KIN INKI;HAN TENSHU
分类号
C23C16/44;H01L21/205;H01L21/22;H01L21/31;H01L21/318;(IPC1-7):H01L21/318
主分类号
C23C16/44
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代理人
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