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发明名称
摘要
申请公布号
JPH0680690(B2)
申请公布日期
1994.10.12
申请号
JP19890303760
申请日期
1989.11.22
申请人
SEIEI KOSAN KK
发明人
SHIMIZU KATSUO;KATAKURA KAZUO
分类号
H01L21/50;(IPC1-7):H01L21/50
主分类号
H01L21/50
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