发明名称 Method for forming a DRAM memory cell with tapered capacitor electrodes
摘要 A DRAM cell structure having a capacitance electrode with a tapered end surface is disclosed. Accordingly, the cell structure of this invention provides increased yield without increasing the number of process steps required to form the cell structure, A unique process for forming the capacitance electrode with a tapered end surface is also provided.
申请公布号 US5354716(A) 申请公布日期 1994.10.11
申请号 US19910727678 申请日期 1991.07.10
申请人 NEC ELECTRONICS, INC. 发明人 PORS, GARY A.;TANG, GERNIA
分类号 H01L27/108;(IPC1-7):H01L21/70 主分类号 H01L27/108
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