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经营范围
发明名称
MICROWAVE PLASMA TREATING DEVICE
摘要
申请公布号
JPH06287761(A)
申请公布日期
1994.10.11
申请号
JP19930096925
申请日期
1993.03.30
申请人
NIPPON STEEL CORP
发明人
KOGA RYUJI
分类号
C23C14/35;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):C23C16/50
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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