发明名称 Method for cleaning surface by heating and a stream of snow
摘要 An improved apparatus and method for removing trace contaminants from the surface of a chosen substrate, such as delicate surfaces or precision parts, wherein the improvement consists of heating a portion of a chosen substrate surface immediately before, during and/or after application of a stream of cleaning snow to the same portion of the substrate surface.
申请公布号 US5354384(A) 申请公布日期 1994.10.11
申请号 US19930056684 申请日期 1993.04.30
申请人 HUGHES AIRCRAFT COMPANY 发明人 SNEED, JOHN D.;KRONE-SCHMIDT, WILFRIED;SLATTERY, MICHAEL J.;BOWEN, HOWARD S.
分类号 B08B7/02;B08B7/00;B23Q11/10;H01L21/304;H05K3/26;(IPC1-7):B08B7/04 主分类号 B08B7/02
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