发明名称 |
Method for cleaning surface by heating and a stream of snow |
摘要 |
An improved apparatus and method for removing trace contaminants from the surface of a chosen substrate, such as delicate surfaces or precision parts, wherein the improvement consists of heating a portion of a chosen substrate surface immediately before, during and/or after application of a stream of cleaning snow to the same portion of the substrate surface.
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申请公布号 |
US5354384(A) |
申请公布日期 |
1994.10.11 |
申请号 |
US19930056684 |
申请日期 |
1993.04.30 |
申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
SNEED, JOHN D.;KRONE-SCHMIDT, WILFRIED;SLATTERY, MICHAEL J.;BOWEN, HOWARD S. |
分类号 |
B08B7/02;B08B7/00;B23Q11/10;H01L21/304;H05K3/26;(IPC1-7):B08B7/04 |
主分类号 |
B08B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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