System for controlling an integrated product process for semiconductor wafers and packages

摘要

A distributed control system for controlling an integrated production process for semiconductor wafers and packages. A workstation is connected to a tester and a sorter/handler for configuring and controlling both devices. An operator need not be aware of different syntaxes and configurations required by different brands of testers, sorters/probers or handlers. The workstation is connected to a computer-aided manufacturing node to obtain setup and other processing control information and to send updated control information to the node through a network. If the data collected from the testers indicates low yield, the computer-aided manufacturing node is alerted.