发明名称 MECHANISM FOR CORRECTING PARALLELISM
摘要 <p>PURPOSE:To provide mechanism for correcting parallelism capable of correcting parallelism of a pressurizing tool and a mounting base in a short time. CONSTITUTION:In the region containing a movable part like an universal coupling mechanism 5 of a mechanism for correcting of parallelism, a low melting point material holding part 9 is arranged, the low melting point material holding part 9 is filled with low melting point material, which is fused by heating, and a pressurizing tool 7 is brought into contact with a mounting surface 17 at the time of fusing, thereby performing correction of parallelism. After correction parallelism is finished, the low melting point material is again hardened, and correction of parallelism is completed.</p>
申请公布号 JPH06283572(A) 申请公布日期 1994.10.07
申请号 JP19930066832 申请日期 1993.03.25
申请人 SEIKO EPSON CORP 发明人 SATO HIDEKAZU
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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