| 摘要 |
PURPOSE:To prevent the change of transmission loss of ultrasonic frequency vibration energy, and realize stable wire bonding of high efficiency, by applying a burr elimination machining to the fixing hole of a horn. CONSTITUTION:Burr elimination machining is applied to burrs after a fixing hole 8 and a narrow trench 7 are formed. That is, plane grinding down to about 0.1mm is performed in the area of 2.5X2.5mm, for the upper end and the lower end of the fixing hole 8, and a flat part 12 is formed. Beveling work 13, e.g. C0.15, wherein the edge of the fixing hole 8 is scraped off by an angle of 45 deg. is performed. To form the flat part 12 is for making the height of the edge of the fixing hole 8 uniform, and improving the workability of the beveling work. Similarly, beveling work 14 is applied to the intersecting part of the fixing hole 8 and the narrow trench 7. Each of the beveling work is thin tooth polishing work which does not generate new burrs. Thereby the state of wire bonding is stabilized, and unexpected failure generation can be prevented. |
