| 摘要 |
PURPOSE:To increase the positional accuracy at an end face, and fix the interval between an emitter and the end face, and also, increase the face accuracy at the end face, and prevent the scattering of a light at the end face, in an end face light emission type of LED array. CONSTITUTION:An end face light emission type of LED array 2 is halved into individual LED arrays 2 by fixing a GaAs wafer 2 onto a tape, and providing a dicing groove 26 from the side of an emitter 10, and then, half-cutting it, and providing a scribe groove 30 from the rear. Since the dicing groove 26 is half-cut, the surface to take out a light from the end face becomes smooth, and since it is not full-cut, the expansion and contraction, etc., of a tape ceases to occur by a dicing groove getting in the tape, and besides as compared with full cutting, both the positional accuracy of the cut face and the face accuracy are high. The crack from the scribe groove 30 runs rectilinearly toward the dicing groove 26, and roughness such as burrs, chipping, etc., do not occur. |
