| 摘要 |
PURPOSE:To prevent the deflection of a long work with a simple constitution and to form a thin film also on both sides of the long work. CONSTITUTION:Guide roller devices 3A, 3B composed of one pair of guide rollers for guiding the edge part of the long work W are arranged between a uncoiling chamber 1 and a coiling chamber 2. Then, the long work W is carried from the uncoiling chamber 1 and the coiling chamber 2 in the posture the thin film forming surfaces become vertical direction. Further, the uncoiling chamber is made to be the uncoiling/coiling chamber 1 used to the recoiling chamber too, and the coiling chamber is made to be the coiling/uncoiling chamber 2 used to the uncoiling chamber too, and by carrying the long work W in both directions between them, the multi-layer thin films can be formed. The interval between the rollers in the guide roller devices 3A, 3B is adjusted from out side and suitably adjusted. |
