| 摘要 |
<p>PURPOSE:To provide a flow rate sensor which has low thermal conductivity and a shock resistance. CONSTITUTION:In a thermo-sensitive flow rate sensor, which is provided with an insulating substrate 8, a groove 9 formed by etching a part of the substrate 8, a beam 10 formed to lie across the upper air of the groove 9, a heating body 12 arranged on the beam 10, a heating body temperature measuring thin film resistor body 13 measuring a change in the quantity of heat taken off from the heating body 12 by a surrounding fluid A, and a fluid temperature measuring thin film resistor body 16 measuring the temperature of the surroundings, in which the fluid A flows, a substrate reinforcing means for reinforcing substrate strength is installed in the groove 9 situated on the upstream side of the beam 10 arranged in the fluid A.</p> |
