COATING FILM FORMING METHOD,申请号JP19930061784-传众专利搜索

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发明名称	COATING FILM FORMING METHOD
摘要
申请公布号	JPH06275507(A)	申请公布日期	1994.09.30
申请号	JP19930061784	申请日期	1993.03.22
申请人	MITSUBISHI ELECTRIC CORP	发明人	TAJIMA TORU
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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