Method and device for handling and for the transportation of wafers in ultra-clean rooms,申请号DE19934309092-传众专利搜索

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发明名称	Method and device for handling and for the transportation of wafers in ultra-clean rooms
摘要	Published without abstract.
申请公布号	DE4309092(A1)	申请公布日期	1994.09.29
申请号	DE19934309092	申请日期	1993.03.22
申请人	SCHEERER, JOACHIM, DR., 6500 MAINZ, DE;GRUETZEDIEK, HARTMUT, DR., 6500 MAINZ, DE	发明人	SCHEERER, JOACHIM, DR., 6500 MAINZ, DE;GRUETZEDIEK, HARTMUT, DR., 6500 MAINZ, DE
分类号	B65G49/07;F24F3/16;H01L21/00;H01L21/677;(IPC1-7):H01L21/68;F24F7/00	主分类号	B65G49/07
代理机构		代理人
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