发明名称 |
Triple-layered ceramic heater |
摘要 |
An improved double-layered ceramic heater, which is used for heating a semiconductor silicon wafer mounted thereon in the processing of semiconductor devices, is proposed to be freed from the problems in the prior art ceramic heaters in respects of service life and contamination of silicon wafers mounted thereon. Different from conventional ceramic heaters having a ceramic substrate plate of, for example, boron nitride provided with a heater element layer of a metal foil, the inventive ceramic heater has a substrate plate of silicon nitride and a heater element layer of graphite is formed thereon by the CVD method so that the ceramic heater is not responsible for contamination of semiconductor silicon by virtue of absence of any element which can be a disturbing dopant of the semiconductor. The problem of contamination with carbon can be solved by further providing a coating layer of silicon nitride by the CVD method.
|
申请公布号 |
US5350720(A) |
申请公布日期 |
1994.09.27 |
申请号 |
US19930045934 |
申请日期 |
1993.04.12 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KAWADA, NOBUO;KUBOTA, YOSHIHIRO;HARADA, KESAZI;ITOU, KENJI |
分类号 |
C04B41/52;C04B41/89;C23C16/26;C23C16/34;C23C16/46;C30B25/10;(IPC1-7):C04B35/58 |
主分类号 |
C04B41/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|