发明名称 APPARATUS HAVING FUNCTION FOR CORRECTING TIME CHANGE
摘要 PURPOSE:To provide an apparatus, which can maintain the initial control performance even if the change during the elapse of time has occurred in an object for control. CONSTITUTION:The apparatus having an operating-amount computing means 101, which computes the operating amount of an object for control 100 with respect to a given target value (a) based on the specified control parameter, is provided. A time-change monitoring means 102 monitors the variable, which is correlated with the change during the elapse of time of the object for control 100. A control-parameter setting means 103 sets the new control parameter based on the operating amount, which is imparted into the object for control 100, and the control amount of the object for control 100 with respect to the operating amount when the value of the variable monitored with the time-change monitoring means exceeds the value, which is determined as the changing time for the control parameter. These means are provided. The time-change monitoring means 102 monitors, e.g. the operating time of the object for control 100 or monitors the operating number of times of the object for control 100.
申请公布号 JPH06267814(A) 申请公布日期 1994.09.22
申请号 JP19930049685 申请日期 1993.03.10
申请人 NIKON CORP 发明人 SAEKI KAZUAKI;UEDA TOSHIO;MAKINOUCHI SUSUMU
分类号 H01L21/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/30
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