| 发明名称 |
Method of making selective conductive regions in diamond layers. |
| 摘要 |
<p>A diamond lattice substrate is irradiated with a high energy particle of sufficient flux, energy level and time period to irreversibly transform an area of a plane normal to the axis of irradition into conductive graphite. The substrate is cooled during irradiation to confine the graphite to the area of the plane at a desired depth within the substrate.</p> |
| 申请公布号 |
EP0442006(B1) |
申请公布日期 |
1994.09.21 |
| 申请号 |
EP19900102887 |
申请日期 |
1990.02.14 |
| 申请人 |
DRESCHHOFF, GISELA A. M.;ZELLER, EDWARD J. |
发明人 |
DRESCHHOFF, GISELA A. M.;ZELLER, EDWARD J. |
| 分类号 |
B01J19/08;C04B41/00;H01B1/04;H01G4/08;H01L21/48;H01L21/768;H05K3/10;(IPC1-7):C30B33/00;C30B29/04;H01L21/285 |
主分类号 |
B01J19/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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