| 摘要 |
An object of the present invention is to provide a method of washing a substrate, wherein even traces of impurities in minute and high-aspect-ratio trenches or holes can be washed and removed free from contamination by washing solution and a system and a method for producing ultrapure water, capable of producing ultrasuper pure water for use in the washing. The present invention is characterized in that, at the intermediate portions of a piping (7) for supplying a predetermined ultrapure water to a use point, there are provided: a first steam generating means (1) for heating a first ultrapure water for conversion into a first steam; a steam heating means (3) for further heating the first steam for conversion into a second steam higher in temperature than the first steam; and a cooling means (5) for cooling the second steam for conversion into a second ultrapure water. <IMAGE> |
