| 摘要 |
<p>PURPOSE:To provide a carrying device, which can continue to carry a substrate safely even in the case where the substrate is not sucked perfectly. CONSTITUTION:In addition to a vacuum sensor 5 for detecting the suction condition of a substrate 1 to a carrying arm 3, an ultrasonic sensor 6 for detecting the existence of a substrate in a movement route of the carrying arm 3 is provided. In the case where both of the vacuum sensor 5 and the ultrasonic sensor 6 detect the existence of the substrate 1, the carrying arm 3 is moved at a predetermined moving speed. In the case where the only ultrasonic sensor 6 detects the existence of the substrate, the carrying arm 3 is moved at a moving speed lower than a predetermined speed. In the case where the ultrasonic sensor 6 does not detects the existence of substrate, the movement of the carrying arm 3 is stopped.</p> |
