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发明名称
SEMICONDUCTOR INSPECTION APPARATUS
摘要
申请公布号
JPH06258385(A)
申请公布日期
1994.09.16
申请号
JP19930043814
申请日期
1993.03.04
申请人
HITACHI LTD;HITACHI DEVICE ENG CO LTD
发明人
TABATA HIROSHI;HORI SATOSHI;OTAWA MASANORI;HANNO TSUTOMU
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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