HEAT-TREATING DEVICE,申请号JP19930067436-传众专利搜索

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发明名称	HEAT-TREATING DEVICE
摘要
申请公布号	JPH06260408(A)	申请公布日期	1994.09.16
申请号	JP19930067436	申请日期	1993.03.02
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	HARA TAKASHI
分类号	H01L21/324;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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