发明名称 |
Production of crack-free CVD diamond articles. |
摘要 |
<p>Cracking of diamond sheets deposited by chemical vapor deposition on substrates such as niobium is sometimes observed as a result of curling of the diamond around the edges of the substrate. Such curling is inhibited by employing a substrate with edges of a metal promoting the formation of graphite. Illustrative graphite-promoting metals are iron, nickel and platinum.</p> |
申请公布号 |
EP0613963(A1) |
申请公布日期 |
1994.09.07 |
申请号 |
EP19940301420 |
申请日期 |
1994.02.28 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WILLIAMS, BRADLEY EARL;KOSKY, PHILIP GEORGE |
分类号 |
C23C16/27;C23C16/26;C23C16/01;C30B29/04;H01L21/205;(IPC1-7):C23C16/26;C23C16/02;C23C16/04 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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