发明名称 Production of crack-free CVD diamond articles.
摘要 <p>Cracking of diamond sheets deposited by chemical vapor deposition on substrates such as niobium is sometimes observed as a result of curling of the diamond around the edges of the substrate. Such curling is inhibited by employing a substrate with edges of a metal promoting the formation of graphite. Illustrative graphite-promoting metals are iron, nickel and platinum.</p>
申请公布号 EP0613963(A1) 申请公布日期 1994.09.07
申请号 EP19940301420 申请日期 1994.02.28
申请人 GENERAL ELECTRIC COMPANY 发明人 WILLIAMS, BRADLEY EARL;KOSKY, PHILIP GEORGE
分类号 C23C16/27;C23C16/26;C23C16/01;C30B29/04;H01L21/205;(IPC1-7):C23C16/26;C23C16/02;C23C16/04 主分类号 C23C16/27
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