Device for the surface treatment of substrates by means of plasma influence

摘要

In the case of a device for the surface treatment of substrates by means of plasma influence, a box-shaped anode (1) is provided with an anode base (2) and a border (3). In consequence, the anode (1) encloses five sides of a parallelepiped cavity (8) whose sixth, open side faces the substrates. Magnetic systems (11, 12) are provided outside the border (3) and their polarity and pole positions are such that magnetic field lines (lines of force) pass through the cavity (8), which magnetic field lines are continuous from one side of the border (3), through the cavity (8), to the opposite side of the border (3). <IMAGE>