发明名称 |
Illumination device for projection exposure apparatus |
摘要 |
An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.
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申请公布号 |
US5345292(A) |
申请公布日期 |
1994.09.06 |
申请号 |
US19930040991 |
申请日期 |
1993.03.31 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SHIOZAWA, TAKAHISA;MURAKI, MASATO;ISHII, HIROYUKI;HAYATA, SHIGERU |
分类号 |
G03F7/20;G03F7/207;H01L21/027;H01L21/30;(IPC1-7):G03B27/54;G03B27/42 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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