| 摘要 |
PURPOSE:To provide an electronic scanning ultrasonic inspection equipment in which a microdefect can be detected even when the number of driving elements is constant by reducing the diameter of ultrasonic beam at a focal point. CONSTITUTION:An ideal delay time generator 10 determines a delay time corresponding to the difference of propagation distance from each element to a focal point based on input values, e.g. frequency and a target focal point F, and sets the delay times for transmitting and receiving delay time circuits 11, 12. A calculator 8 determines a focal position F0 where the diameter of ultrasonic beam increases. A comparator 6 compares the focal point F0 with an input value F and transmits/receives ultrasonic wave with an ideal delay time set for the circuits 11, 12 if F>=F0. If F<F0, ultrasonic wave is tranmitted/ received with the ideal delay time added with a correction delay time. This constitution allows reduction of ultrasonic beam diameter at focal point even when the focal point of ultrasonic wave is altered in the inspection while fixing the number of driving elements in an array probe 1. |
