发明名称 ORIENTATION REGULATING MECHANISM FOR SURFACE/INTERFACE ATOMIC ARRANGEMENT ANALYZER
摘要 PURPOSE:To provide an orientation regulating mechanism for surface/interface atomic arrangement analyzer which can measure the orientation (in-plane rotation and swing angle) of a sample over a wide range with high positioning accuracy. CONSTITUTION:The orientation regulating mechanism being installed in a vacuum chamber of a system for analyzing atomic arrangement on the surface or interface of a sample in X-ray diffraction measurement or X-ray standing wave measurement comprises a rotatable sample holder 2, a pulse motor 3 rotating at an r.p.m. determined by a predetermined number of pulses required for in-plane rotation (phi axis) of the holder 2, a semicylindrical arm 4 to be fixed with the holder 2, a pulse motor 5 causing swing angle (X axis) movement of the holder 2 along the arm 4, a large goniometer for coupling the arm 4 and a shaft (omega axis) 7 and transmitting rotation externally, and a rotary arm (2theta axis) 8 carrying a scattering X-ray detector.
申请公布号 JPH06242028(A) 申请公布日期 1994.09.02
申请号 JP19930033624 申请日期 1993.02.23
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 SUGIYAMA MUNEHIRO;MAEYAMA SATOSHI;OSHIMA MASAHARU
分类号 G01N23/207 主分类号 G01N23/207
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