摘要 |
PURPOSE:To provide an orientation regulating mechanism for surface/interface atomic arrangement analyzer which can measure the orientation (in-plane rotation and swing angle) of a sample over a wide range with high positioning accuracy. CONSTITUTION:The orientation regulating mechanism being installed in a vacuum chamber of a system for analyzing atomic arrangement on the surface or interface of a sample in X-ray diffraction measurement or X-ray standing wave measurement comprises a rotatable sample holder 2, a pulse motor 3 rotating at an r.p.m. determined by a predetermined number of pulses required for in-plane rotation (phi axis) of the holder 2, a semicylindrical arm 4 to be fixed with the holder 2, a pulse motor 5 causing swing angle (X axis) movement of the holder 2 along the arm 4, a large goniometer for coupling the arm 4 and a shaft (omega axis) 7 and transmitting rotation externally, and a rotary arm (2theta axis) 8 carrying a scattering X-ray detector. |