| 摘要 |
PURPOSE:To heighten the utilization efficiency of a laser beam when performing the working of an object to be worked by a laser beam according to a mask pattern. CONSTITUTION:A reflection film 6 possible to reflect a laser beam 3 is provided according to a working pattern on the surface of a substrate 5 possible to transmit the laser beam 3 to make it a mask 2. Plural these masks 2 are arranged side by side so that the reflection film of a rear mask is not placed upon that of a front mask to the optical axis direction of a laser beam. A laser beam 3A reflected from the reflection mask 6 of each mask, irradiates plural objects to be worked 1 respectively. A laser beam irradiating a front mask, transmits the mask, and irradiates the next mask. Consequently, a laser beam can be effectively used. |
