PROCESS OF MANUFACTURE OF SILICON PLATES WITH GETTERING CENTERS IN BULK OF PLATE,申请号SU19874348246-传众专利搜索

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发明名称	PROCESS OF MANUFACTURE OF SILICON PLATES WITH GETTERING CENTERS IN BULK OF PLATE
摘要
申请公布号	RU1499627(C)	申请公布日期	1994.08.30
申请号	SU19874348246	申请日期	1987.12.22
申请人	ENISHERLOVA-VELYASHEVA K.L.;RUSAK T.F.;MILVIDSKIJ M.G.;ANTONOVA I.A.;VORONKOV V.V.;SHMELEVA G.G.;REZNIK V.YA.;KUTS V.A.	发明人	ENISHERLOVA-VELYASHEVA K.L.;RUSAK T.F.;MILVIDSKIJ M.G.;ANTONOVA I.A.;VORONKOV V.V.;SHMELEVA G.G.;REZNIK V.YA.;KUTS V.A.
分类号	H01L21/322;(IPC1-7):H01L21/322	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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