| 摘要 |
<p>PURPOSE:To simply position a wafer while the wafer is placed on an arm and to effectively position the wafers individually by forming the abutting part of the arm in a circular arc shape along the circumferential side face of the wafer, and forming the chordal end of the circular arc wider than that of an orientation flat part. CONSTITUTION:The abutting part of an arm 3 is formed in a circular arc shape along the circumference of a wafer 2, and a roller 22 is so disposed as to abut on the wafer 2 at a position wider than the shortest distance of the other end of an orientation flat part to the center line of the circular arc when one end of the orientation flat part is aligned with the circular arc end from the center line of the circular arc at least at both sides to abut on the wafer 2 with the circular arc. When the arm 3 is pressed forward to press the wafer 2 to the abutting part 4 of the arm 3, the wafer 2 is positioned at a predetermined position by the centering action of the roller 22 and the contacting part 4 of the arm even if the orientation flat part is disposed at any position, and then placed on the waver to be transfer. Thus, the wafers are positioned on the arm effectively one by one.</p> |
