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发明名称
MICROMINIATURE VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH06235059(A)
申请公布日期
1994.08.23
申请号
JP19920231850
申请日期
1992.08.31
申请人
TOHO KAKEN KK
发明人
NAGASHIMA HAJIME
分类号
C23C14/00;H01L21/203;H05H1/46;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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