SYSTEM FOR RECORDING DATA PATTERN ON PLANAR SUBSTRATE

摘要

PURPOSE: To provide a quick method with less processes for generating a photographic tool used in semiconductor industry. CONSTITUTION: A photograph means generator without photoengraving uses a pulsated excimer laser so as to form the image of a deformable mirror space light modulator 1 on a thin abrasive coating on a crystal substrate 9. Light pulses abrade and clear the coating from an area selected corresponding to a data pattern in a deformable mirror array. The uniformity of exposure is improved by a two-dimensional overwriting method. The high image reduction ratio enables high energy density on the substrate 9 without exceeding the allowable energy density on the deformable mirror array. Since recording is the one without photoengraving (that is, developing is not required), generated images are proved immediately after write. The final feature is provided with importance especially relating to a phase mask.