| 摘要 |
PURPOSE:To align any size of photosensitive substrates with high superposing accuracy by providing an objective holding means in a state where the means can be moved in the direction perpendicular to the arranging direction (X direction) of a first and second objective optical systems and driving the holding means in accordance with the size of the photosensitive substrate. CONSTITUTION:All members of the device except a laser light source 10 are held by an objective holding member 30. Each member and objective holding members 30 and 31 which hold objectives M1 and M2 are driven in Y-direction by means of a driving section 32. As a result, the detecting center of a detecting optical system can be moved in Y-direction at the time of changing the positions of alignment marks AM1 and AM2. Since the lenses M1 and M2 are constituted so that they can be integrally moved, the detection center of the detecting optical system hardly deviates at the time of movement. Therefore, any size of plates can be aligned with high accuracy. |
