| 摘要 |
PURPOSE:To prevent polishing irregularities and hair lines by changing the axial vibration speed of a rotational polishing tool with the change of the rotational polishing tool in cutting force. CONSTITUTION:A coating polishing device which has a rotational polishing tool 1 and a vibration drive means 3 to vibrate the rotational polishing tool l in an axial direction is provided with a rotating speed detecting means 6 to detect the rotating speed of the rotational polishing tool 1, a thrust detecting means to detect the thrust of the rotational polishing tool 1 on a polished face F and a cutting force computing means 81 to compute the cutting force on the polished face F in accordance with information from the rotating speed detecting means 6 and the thrust detecting means 7, as well as a vibration speed computing means 82 to compute the vibration speed of the vibration drive means 3 in response to the cutting force found by the cutting force computing means 81 and a control means 83 to control the output, of the vibration drive means 3 to be a vibration speed found by the vibration speed computing means 82. |
