| 摘要 |
PURPOSE:To embody optimum line width and space at every wiring part in the case of determining mask layout. CONSTITUTION:A mask layout means 2 draws out mask layout according to figures inputted from an information inputting means 1, and an optimum line and space calculating means 3 detects data of wiring parts from the mask layout pattern, and finds optimum line and space which minimize RC delay from the resistance value and the capacitance value at each wiring part. A layout data changing means 4 changes mask layout so that the line and space at each wiring part may be the optimum line and space calculated respectively. |
