| 摘要 |
PURPOSE:To obtain easily a carbon film maintaining its superior physical, electrical and chemical characteristics in a short time by plasma-spraying carbon powder in a nonoxidizing atmosphere. CONSTITUTION:A spray chamber 11 is kept in a vacuum state under <=10<-3>Torr pressure or is filled with an atmosphere of an inert gas 13 by regulating a gas introducing valve 14 and a reducing valve 15. A plasma flame 22 is generated in the chamber 11 with a spray gun 10 controlled and worked with a powder feeder 16, a powder carrier gas 17, a working gas 18, a controller 19, a power source 20 and cooling water 21. Carbon powder is then introduced into the flame 22 from a powder feeder 16 with an inert gas 17 as a carrier, and the powder is melted and transferred to form a sprayed carbon film on a substrate 24. |
