摘要 |
PURPOSE: To reduce the number of holes required for each inter-connection and to effectively reduce a surface area necessary for a circuit by providing a number of programmable anti fuses. CONSTITUTION: A plurality of anti fuses are used for electrically connection with one or both of a pair of interconnections 3. The circuit has plural pairs of interconnections 3, which respectively have a conductive surface 35, an amorphous silicon layer 7, a barrier wall layer 9, a pattern-formed dielectric layer 5 having at least one window exposing a part of the amorphous silicon layer 7 and that of the top part of the barrier wall layer 9, and an aluminum layer. The silicon layer 7 and the barrier wall layer 9 cover the surface of a substrate 1 between the pair of interconnections 3. When an appropriate program voltage is applied, a conductive path occurs in one or both of the interconnections 3. This arrangement requires two anti fuses 137, which saves a considerable amount of substrate area. |