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发明名称
MANUFACTURE OF THIN FILM
摘要
申请公布号
JPH06216021(A)
申请公布日期
1994.08.05
申请号
JP19930006123
申请日期
1993.01.18
申请人
TORAY IND INC
发明人
OKA TETSUO;TSUKAMOTO JUN;TANAKA KAZUO
分类号
G03F7/11;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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