METHOD AND APPARATUS FOR PRODUCING SUBSTRATE SHEET FOR OPTICAL RECORDING MEDIUM, PRODUCTION OF STAMPER AND PRODUCTION OF PHOTOMASK

摘要

PURPOSE:To provide the method capable of producing the substrate having excellent thickness accuracy by clamping and pressing a thermoplastic resin while bringing a roll stamper and a forming roll into contact therewith via a gap regulating means. CONSTITUTION:The roll stamper 102 is constituted by fixing a flexible stamper on the peripheral surface of a roll base material 109 and forming the gap regulating means 108 in the region exclusive of the region where the thermoplastic resin sheet 106 comes into contact. The roll stamper 102 and the forming roll 104 clamp and press the resin sheet 106 while the stamper and the roll are pressed to each other so as to come into contact with each other via the gap regulating means 108. The dependency of the gap formed of the roll stamper 102 and the forming roll 104 in which the resin sheet 106 passes on the eccentricity of the respective rolls is eliminated by such constitution. The substrate sheet 107 for the optical recording medium having the excellent thickness accuracy of preformat patterns 103 is thus produced at a low cost.