| 摘要 |
Prodn. of Josephson and tunnel contacts comprises depositing a base electrode made of high-temp. superconducting material onto a substrate with the aid of a mask and then depositing an insulator in the same way. A thin layer and a high temp. superconductor are deposited using a mask technique.The novelty is that the substrate holder (8) rotates during layer deposition, where the atoms (7) coaxially hit so that during deposition of the 1st layers, half of the substrate (10 is covered by a mask (6) having a distance of less than 10 microns from the substrate (1) with the and of legs (10). After applying the high temp. superconducting (2) as 1st layer, the oxygen partial pressure and/or the angle (alpha), which interleaves the substrate holder during application of the insulator with the rotation axis, is changed so that the pressure is lower and the angle higher. After deposition of both 1st layers, the mask (6) is removed and the relatively thin barrier layer (4) and high temp. superconductor are applied as covering electrode (5) whilst the substrate holder (9) is rotated about the rotation axis (8).
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