| 摘要 |
PURPOSE:To precisely control the posture of a polishing tool by dividing a picked-up image into a plurality of subimages and by analyzing positional data for a defect part in accordance with data for a normal line of a subimage where a defect part exists. CONSTITUTION:An image K picked up by an image pick-up means 2 is divided into a plurality of subimages, and components in a normal line direction with respect to X and Y-axes (in vertical and longitudinal directions) are obtained as normal line data as to the subimages A1 to A3, B1 to B3 and C1 to C3, and are stored in a normal line date memory means 3. An analyzing means 4 obtains a part to be polished, as positional data of the subimages A1 to A3, B1 to B3 and C1 to C3 by analysis. A posture control means 5 controls the posture of a polishing tool 34 with respect to a work surface in accordance with the positional data obtained by the analyzing means 4 and the normal line data stored in the memory means 2. With this arrangement, the posture of the polishing tool 34 in the normal line direction can be precisely controlled, thereby it is possible to reduce the number of storage data and to speed up the process. |
